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Sulphur Hexafluoride (SF6 - elegas)
1. Description:
Sulfur hexafluoride is a colorless in-noxious and non-flammable gas at atmospheric temperature. With excellent electric insulating and arc-quenching capacity, sulfur hexafluoride gas has been widely used in the fields of electric, laser, medical, meteorological, freezing, fire-fighting, chemical, military, space aviation, nonferrous metallurgy and physical research etc.
2. Physical properties
Properties
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Index
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Chemical formula
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SF6
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CAS No.
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2551-62-4
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Molecular Weight
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146.06
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Sumlimation Point
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- 63.8 oC
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Melting Point
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- 50.8 oC
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Critical Temperature
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45.64 oC
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Critical Pressure
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37.19 atm
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Gas Density @ 20 oC , 1 atm
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6.139 g/L
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3. Typical technical data
Grade Classificastion
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Qualified
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Technical Grade
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High-purity Grade
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SF6 Content, %
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min. 99.8
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min. 99.9
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min. 99.99
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Air Content, %
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max. 0.05
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max. 0.03
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max.0.003
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CF4 Content, %
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max. 0.05
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max. 0.03
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max. 0.003
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Moisture Content, ppm
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max. 8
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max. 2
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max. 1
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Acid Content, ppm
( in terms of HF)
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max. 0.3
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max. 0.3
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max. 0.3
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Hydrolysable Fluoride Content, ppm
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max. 1.0
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max. 0.3
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max. 0.3
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Mineral Oil Content, ppm
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max. 10
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max. 3
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max. 3
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Toxicity
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non- toxic
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4. Applications
In semiconductor manufacturing, sulfur hexafluoride is a fluorine source for high density plasma etching without generating carbon by-products. SF6 can be used for etching metal silicides (specially tungsten etchback), nitrides and oxides versus their metal substrates.In other industries, Sulfur hexafluoride is a insulating material used as a dielectric in electrical transformers. SF6 can be used as a inert blanketing agent. SF6 is a tracer gas for determining ventilation rates and air movements in buildings.
5. Packing, storage , and transportation
- Packing: 10kg or 50kg packed in the qualified gas cylinder or packed according to the demands
- Storage and Transportation: Use, store and transport below 45 oC. Store in cool and well-ventilated areas. Keep away from fire, heat, sunlight and flammable substances. Handle carefully when loading and unloading to avoid damages to gas cylinders and accessories.
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