Sulphur Hexafluoride (SF₆ - elegas)

1. Description:

Sulfur hexafluoride is a colorless in-noxious and non-flammable gas at atmospheric temperature. With excellent electric insulating and arc-quenching capacity, sulfur hexafluoride gas has been widely used in the fields of electric, laser, medical, meteorological, freezing, fire-fighting, chemical, military, space aviation, nonferrous metallurgy and physical research etc.

2. Physical properties

3. Typical technical data

4. Applications

In semiconductor manufacturing, sulfur hexafluoride is a fluorine source for high density plasma etching without generating carbon by-products. SF₆ can be used for etching metal silicides (specially tungsten etchback), nitrides and oxides versus their metal substrates.In other industries, Sulfur hexafluoride is a insulating material used as a dielectric in electrical transformers. SF₆ can be used as a inert blanketing agent. SF₆ is a tracer gas for determining ventilation rates and air movements in buildings.

5. Packing, storage , and transportation

• Packing: 10kg or 50kg packed in the qualified gas cylinder or packed according to the demands
• Storage and Transportation: Use, store and transport below 45 ^oC. Store in cool and well-ventilated areas. Keep away from fire, heat, sunlight and flammable substances. Handle carefully when loading and unloading to avoid damages to gas cylinders and accessories.